Study on Infrared Transmittance of Si-Polymer Hybrid Structure Press Molded Using a Coupling Agent

抄録

Hybrid structures of single-crystal silicon and high-density polyethylene (HDPE) with high transmittance in the mid-to-far infrared region are used as infrared lens substrates. The hybrids are usually fabricated by high-precision press molding. The Si-HDPE hybrid lens previously fabricated had a low transmittance in the 9–10 μm wavelength region, thereby limiting its application for human body detection. In this study, a Si-polymer hybrid structure was fabricated using a new polymer without any silane coupling agent. Interfacial adhesion between the polymer and the Si substrate was realized with an extremely thin (a few micron thick) layer of an interfacial silane coupling agent. The press molding conditions that led to improved bonding strength and infrared transmittance of the hybrid substrate were investigated. A transmittance similar to that of a single-crystal Si substrate was achieved in the 9–10 μm wavelength range.