Calibrator for 2D Grid Plate Using Imaging Coordinate Measuring Machine with Laser Interferometers

抄録

A calibrator for 2D grid plates have been developed. The calibrator was based on a commercial imaging coordinate measuring machine (imaging CMM). A laser interferometer for the calibration of the x-coordinate and two laser interferometers for the calibration of the y-coordinate were attached to the imaging CMM. By applying multistep measurement method for the calibration procedure, the geometrical error in the calibrator was reduced. The calibration of a precision 2D grid plate was demonstrated, and the expanded uncertainty was estimated to be 0.2 μm (k=2).