Development of Side Wall Surface Smoothing Method by Large-area Electron Beam Irradiation

抄録

Surface smoothing of mold steels with planar shape can be performed efficiently by large-area electron beam (EB) irradiation. However, it is difficult to smooth side wall and bottom surfaces in hole shape by the EB irradiation, since the EB tends to concentrate on entrance edge or upper inside wall of hole. The bottom surface of high aspect ratio hole could be smoothed by the EB irradiation under magnetic field control. On the other hand, smoothing of side wall surface in hole shape, and appropriate magnetic field for guiding the EB to the side wall surface have not been clarified yet. In this study, smoothing of side wall surface in hole shape by the EB irradiation was proposed. Experimental results indicate that whole area of side wall surface in hole shape can be uniformly smoothed by the EB irradiation under appropriate magnetic force lines distributions and magnetic flux density.