Effect of Ion Irradiation on the Modification of Materials Surface

抄録

Modification of materials surface by ion beam technology is reviewed shortly with emphasis on the effect of ion bombardment on the microstructure of the surface. Ion-solid interactions are described in correlation with several ion beam processes and importance of ion beam dynamic mixing (IBDM) as well as metal ion implantation is demonstrated for the future trend of surface modification of materials by ion beam irradiation. Experimental results on the modification of metals and/or ceramic materials by various ion beam processes are given for the ion energy ranging from eV to MeV.