抄録
The structural and luminescent properties of ZnO thin films prepared by the electron beam evaporation technique have been investigated. The films showed c-axis oriented ZnO and their crystallinity was improved by heat treatment in air and Ar atmosphere. Almost of all films showed PL and CL with peak at around 510nm, whereas the film annealed at 800℃ in air showed the spectrum with peak at about 540nm. The 510nm emission is thought to correspond to the blue-green emission of ZnO : Zn phosphor. In CL measurement, about CL luminance of 60cd/m^2 was obtained under excitation at 2kV and 400μA/cm^2. Moreover, it was shown that CL can be obtained even 250eV without charging-up on the film surface.
