Abstract
We propose a new field emission type infrared sensor, which is constructed with a PZT ceramic as ferroelectrics material and an Al electrode. The Al electrode is separated by a quartz plate (the distance between the Al electrode and the PZT plate kept about 10μm.) On this sensor, a PZT ceramic plate act field emitter and the Al is an anode electrode. The PZT plate was irradiated by infrared light in a vacuum chamber. From the experiment, anode current was lineally proportional to the incident infrared light power, and the principle of this sensor was confirmed. An emission current is also increase as the anode voltage is increase. On the other hand, the increment of the emission current was not observed on the sensor used a PZT which had reverse spontaneous polarization.