抄録
The performance of Liquid Crystal Display (LCD) has rapidly improved over the past several years. In the meantime failures and previously unreported phenomena have occurred and some of them are caused by low-level impurity contamination with organic or inorganic materials and the non-uniform distribution of these materials in large area of LCD. In order to analyze the failures, time-of-flight secondary ion mass spectrometry (TOF-SIMS) analysis was applied. Visualization for mapping data of TOF-SIMS was successfully demonstrated. Its technology can be applicable to prompt analysis of LCD failures.
