20-3 1-inch 256×192 Pixel Field Emitter Image Sensor with HARP target

Abstract

We have been developing a new image sensor with a field emitter array (FEA) and a high-gain avalanche rushing amorphous photoconductor (HARP) target, with the aim of using it in ultrahigh-sensitivity, high-resolution compact TV cameras. A256×192 pixel sensor with a pixel size of 50μm×50μm, and its electron-beam focusing system consisting of permanent magnets were fabricated and tested. The experimental results show that the prototype sensor has both enough resolution for its pixel size and high sensitivity due to the HARP target, thus demonstrating its potential as a practical image sensor.