20-9 CMOS pHイメージセンサの製作(第20部門 特殊撮像・新機能新原理のイメージセンサ)

抄録

A pH sensor is one of the important sensors in various biosensors, and the various kinds of pH sensor have been developed. In this paper, we present new pH sensor (pH imaging sensor), which is possible to measure two-dimensional (2-D) distribution of various chemical reaction. The proposed pH imaging sensor is able to measure on real time, a lot of unknown chemical phenomena will be cleared.