14-3 Application of Color Filter and Microlens Array to Backside Illuminated Ultrahigh Speed CCD

Abstract

We propose a method to apply a color filter made on another transparent substrate to colorize the BSI CCD chip processed chip-based BSI. Before applying this method, we analyzed the color crosstalk on this BSI CCD by optical simulation. Amount of crosstalk depends on the distance to the surface of BSI CCD, but it can be reduced and stabilized by the application of microlens. This method can absorb the uneveness of the surface on BSI CCD.