PROCEEDINGS OF THE ITE ANNUAL CONVENTION
Online ISSN : 2424-2292
Print ISSN : 1343-1846
ISSN-L : 1343-1846
2012
Session ID : 15-1
Conference information

Name : 2012 ITE Annual Convention

Location : [in Japanese]

Date : August 29, 2012 - August 31, 2012

15-1 Evaluation of bending tolerance for oxide TFTs formed on ultrathin plastic films
Hiroto SATO, Mitsuru NAKATA, Genichi MOTOMURA, Yoshiki NAKAJIMA, Hiroshi TSUJI, Yoshihide FUJISAKI, Tatsuya TAKEI, Toshihiro YAMAMOTO, Hideo FUJIKAKE
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Abstract
Bending tolerance of InGaZnO4 (IGZO) TFTs formed on an ultrathin polyimide film was evaluated. The IGZO layer and a SiOx gate insulator were formed at room temperature and annealed at 130℃ in ambient air. We found that the TFT characteristics were maintained even after the device was rolled at a small radius of 1mm.
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© 2012 The Institute of Image Information and Television Engineers
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