10-6 Maxwell方程式の拡張によるFDAノイズの特性解析(第10部門情報センシング1)

抄録

The device simulation with considering propagation of electromagnetic field induced by gate electrodes is realized by extension of Maxwell's equations and finite difference time domain (FDTD) method. It is shown that floating diffusion amp (FDA) noise induced by electromagnetic wave strongly depends on the substrate thickness.