映像情報メディア学会誌
Online ISSN : 1881-6908
Print ISSN : 1342-6907
ISSN-L : 1342-6907
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ボトムコンタクト型有機TFTの特性改善とそれを用いたフレキシブル液晶表示パネルの試作
藤崎 好英新井 俊希大竹 浩丸山 裕孝井上 陽司藤掛 英夫時任 静士栗田 泰市郎
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2006 年 60 巻 9 号 p. 1428-1434

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We developed an organic thin-film transistor (OTFT) -driven 16×16 polymer-dispersed liquid crystal (PDLC) display panel on a flexible plastic film. We fabricated low-voltage-operation bottom-contact (BC) OTFT with Ta2O5 gate insulator, using photolithography method. This transistor is suitable for both scaling down and increasing the number of pixels, however its performance is inferior to that of top-contact OTFT because of contamination and defects on the surface of the insulator, and leakage-current of channel region. We have reduced the current of the OTFT by optimizing the pentacene deposition area. We used O2 plasma, UV cleaning and HMDS as surface treatments suitable for Ta2O5 gate insulator, to improve the characteristics. The OTFT showed a good carrier mobility of 0.3 cm2/Vs, a high current on/off ratio of over 106 and a low operating drain voltage of -6V. We also successively confirmed display operation of the fabricated 16×16 PDLC display panel with a low driving voltage of 13 volts.

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© 2006 一般社団法人 映像情報メディア学会
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