抄録
A simulation code to calculate beam trajectories and aberration coefficients of electron beams including both electric lenes and magnetic deflection fields has been developed. The program can calculate effects of misconvergence on the thin ferro-magnetic plate, deflection sensitivity, eddy current loss of windings, and leakage flux of the deflection yoke. This paper describes the analytical method used in the program and the simulated results concerning the deflection. The simulated results agreed well with our experiments. We have demonstrated that the developed program is effective for numerically designing a deflection yoke.
