Abstract
An overview of the major initiatives in display technology and manufacturing in the United States is presented with emphasis on the markets, government, industry, and university consortia. Special emphasis will be given to the Center for Display Technology and Manufacturing at the University of Michigan. The Center programs are focused in advanced process control, microelectronics on low temperature substrates, factory optimization and control and flat panel display materials, devices and circuits. Recent advances in high mobility TFTs using high deposition rate materials as well as real time sensing and control of reactive ion etching of amorphous silicon, poly silicon and silicon nitride will be presented.
