抄録
Induced uniaxial anisotropy in nanocrystallite Fe-Ta-N soft magnetic thin film has been investigated. It was found that the uniaxial anisotropy can be induced by applying a magnetic field during deposition. The direction of the uniaxial anisotropy can be changed by sputtering condition or by annealing in magnetic field. The nitrogen atoms play an important rule in uniaxial anisotropy. The occupation and diffusion of nitrogen atoms in α-Fe lattice are lattice are the origin of inducing and changing uniaxial anisotropy.
