ITE Technical Report
Online ISSN : 2424-1970
Print ISSN : 1342-6893
ISSN-L : 1342-6893
23.30
Session ID : IPU'99-13/CE'99-1
Conference information
New Technologies of Photo-Sensitivity Improvement and VOD Shutter-Voltage Reduction for CCD Image Sensors
I. Murakami, T. Nakano, K. Hatano, Y. Nakashiba, M. Furumiya, T. Nagata, H. Utsumi, S. Uchiya, K. Arai, N. Mutoh, A. Kohno, N. Teranishi, Y. Hokari
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Abstract
New technologies to improve a photo-sensitivity and to reduce a shutter-voltage of the vertical over-flow-drain (VOD) have been developed for CCD image sensors. A 40% photo-sensitivity improvement was obtained by forming an anti-reflection film over the photodiode, in addition to reducing the thickness of player formed at the photodiode surface. A VOD shutter-voltage reduction from 31 V to 18 V was successfully obtained by using an epitaxially-grown substrate with double impurity concentration layers.
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© 1999 The Institute of Image Information and Television Engineers
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