ITE Technical Report
Online ISSN : 2424-1970
Print ISSN : 1342-6893
ISSN-L : 1342-6893
23.49
Session ID : IPU'99-47
Conference information
CMOS Image Sensor Overlaid with a HARP Photoconversion Layer
Y. IshiguroT. WatabeH. OhtakeK. YamanoM. YamauchiT. TajimaY. TakiguchiT. HayashidaM. KosugiH. KokubunT. WatanabeM. Abe
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract
We have fabricated a 128×128 CMOS image sensor overlaid with a HARP film making use of high voltage endurance MOS transistors and indium micro-bump process. We obtained the characteristics of the HARP film and CMOS readout circuit with this device and confirm a signal multiplication in an avalanche mode. The result demonstrates that this sensor is expected to have high sensitivity. It is also important to make noise lower and achieve high signal-to-noise ratio.
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© 1999 The Institute of Image Information and Television Engineers
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