Abstract
A wave optical simulator TOCCATA-Wave 3D was newly developed in order to analyze optical characteristics of 3-D structures including diffraction and interference. Optical characteristics of inner-layer lens structures are studied by this simulator. The inner-layer lens structure gives better concentrated focal region and smaller lateral shift of the focal region under the oblique incident light, comparing with the single lens structure. It is found that the improvement of the light-gathering power by the inner-layer lens structure is remarkable in the case of the small F-number and large top lens height.
