Abstract
Charged particles such as ion and electrons with keV order kinetic energy are important for probes and signals for surface analyses. Many detection systems have been developed for measurement of two-dimensional distribution for the particles. However, capabilities of solid-state area detector are not sufficient for quantitative analysis for the charged particles, although solid-state imager such as charge coupled device has been great succeeded to photon detection for optical spectroscopy. This paper discussed performance and characteristics of a novel solid-state imager for charged particles. This device is useful to charged particle detection such as mass spectrometry and electron microscopy.
