ITE Technical Report
Online ISSN : 2424-1970
Print ISSN : 1342-6893
ISSN-L : 1342-6893
24.68
Session ID : MMS2000-57
Conference information
Imaging GMR Sensors with Magnetic Force Microscopy Enhanced Surface Ion Milling
Silas T. F. HungC. Y. WongL. Z. ZhangRandy Bordeos
Author information
Keywords: MFM, GMR head, ESD
CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract
In the development of an industry adaptable failure analysis technique for the study of ESD stressed GMR head is highly recommended. We developed a method with combined ion milling and MFM for GMR head failure analysis. This technique provides both fast sample preparation and characterization. It provides basically three observations of GMR film, including the roughness on the GMR element, the abutting junction, and the hard bias magnetization state. These three observations could provide a qualitative analysis on ESD damage of HGA.
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© 2000 The Institute of Image Information and Television Engineers
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