Abstract
Integrated MEMS have been effectively applied for capacitive sensors by integrating capacitance detection circuits and for arrayed MEMS to reduce the lead wires. Integrated MEMS are expected for RF to reduce stray inductance. Mechanical sensors for pressure, acceleration and force, biomedical devices as active catheter and ultrasound transducers and wireless chips which have multiple band MEMS filters are described as examples of the integrated MEMS.
