Abstract
Optical elements for display are required more complex control of the incident light, therefore measurements and evaluations of three-dimensional surface shape become more important. However conventional measurement methods of the surface shape can't measure samples with very flat surface or steep slope accurately. In this study, we try to measure three-dimensional shape with SEM more accurately by making fine pattern with scattering nanoparticles. As a result, we show the relation between the magnification of the nanoparticles and the accuracy of the measurement, and confirm the validity of the measurement.
