ITE Technical Report
Online ISSN : 2424-1970
Print ISSN : 1342-6893
ISSN-L : 1342-6893
37.19
Session ID : IST2013-13
Conference information
A Rolling-Shutter Distortion-Free 3D Stacked Image Sensor with -160dB Parasitic Light Sensitivity In-Pixel Storage Node
Jun Aoki, Yoshiaki Takemoto, Kenji Kobayashi, Naofumi Sakaguchi, Mitsuhiro Tsukimura, Naohiro Takazawa, Hideki Kato, Toru Kondo, Haruhisa Saito, Yuichi Gomi, Yositaka Tadaki
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Keywords: CMOS Image Sensor, 3D stacked structure, Global shutter, In-Pixel Storage Node
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Abstract
Rolling shutter distortion free 3D stacked image sensor with an in-pixel storage node of -160dB parasitic light sensitivity has two semiconductor substrates, and one substrate has a backside illuminated photo diode array and the other a storage node array. The image sensor has 8.4μm pitched interconnections. An interconnection yield of over 99.9% is achieved.
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© 2013 The Institute of Image Information and Television Engineers
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