継目なし円筒モールド(SRM)による高解像度印刷技術の開発(ディスプレイ材料・製造技術シンポジウム)

抄録

For the future electronics devices, like printed electronics, Asahi-Kasei has been developing SRM fabrication technology. We got fine and accurate patterns on the roller surface by development applied process of conventional EB lithography, named rEBL process. This paper shows the detail of rEBL process and some demonstrated patterns on thin plastic substrates.