進行波型圧電ポンプの研究 実験とシミュレーションによる結果

辺見 信彦; 田中 道彦; 須田 晃正; 唐沢 文明; 市河 雅彦; 大嶋 清; 宮原 直紀

doi:10.11511/jacc.48.0.53.0

48th Proceedings of the Japan Joint Automatic Control Conference

Session ID : D1-41

DOI https://doi.org/10.11511/jacc.48.0.53.0

Conference information

Host: The Society of Instrument and Control Engineers, The Institute of Systems, Control and Information Engineers, The Japan Society of Mechanical Engineers, The Society of Chemical Engineers, Japan, The Japan Society for Precision Engineering, The Japan Society for Aeronautical and Space Sciences

Co-host: Technically Cosponsored by 43 Socies and Institutes

A Study of Progressive Wave Type Piezoelectric Pump

Results of Experiments and Simulation

*Nobuhiko Henmi, Michihiko Tanaka, Akimasa Suda, Fumiaki Karasawa, Masahiko Ichikawa, Kiyoshi Ohshima, Naoki Miyahara

Author information

Keywords: piezoelectric pump, bimorph cell, progressive wave, piezoelectric actuator

CONFERENCE PROCEEDINGS FREE ACCESS

Details

Abstract

This study is about a novel small piezoelectric pump. The pump utilizes a thin vibration plate on which bimorph type piezoelectric actuators generate progressive wave. It doesn't use check valves and can send fluid to both forward and backward directions. In this report, principle of the proposed pump is described at first, and then examination by experiment is discussed. Motion of the vibration plates in the air for sinusoidal drive with phase difference among the bimorph cells is investigated. Characteristics of the pump are examined by experiments. As a result, effectiveness of principle of the pump with progressive wave is shown. Ability and problems of the experimental pump in the present condition are clarified.

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