THE 53RD JAPAN JOINT AUTOMATIC CONTROL CONFERENCE
Session ID : 409
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Host: The Japan Society of Mechanical Engineers, The Society of Instrument and Control Engineers, The Institute of Systems, Control and Information Engineers, The Society of Chemical Engineers, Japan, The Japan Society for Precision Engineering, The Japan Society for Aeronautical and Space Sciences
Co-host: Technically Cosponsored by 50 Societies and Institutes
Mechanical Control 2
Precise Positioning of Micro Motion Air Guide Stage Driven by Pneumatic Bellows
*toshiyuki yamamoto, toshinori fujita, kazutoshi sakaki, kenji kawashima, toshiharu kagawa
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