Validation of X-ray interference correction methods in quantitative electron probe microanalysis (EPMA)

Abstract

X-ray interference correction methods in quantitative electron probe microanalysis (EPMA) are validated to understand their accuracy and robustness. X-ray interferences by Th and Y are validated in this study using synthetic standard materials. X-ray intensity based method, calculating the interference factor directly from X-ray intensities, is sensitive to the mass attenuation coefficients of target material. On the other hand, chemical composition based method, calculating the factor from corrected chemical compositions, is less sensitive to the m.a.c.s of the target material.