Design of Double PSDs mounting plate on the tracing measurement system

Abstract

On the tracing measurement system, which based on the double position sensitive detectors (PSDs), the position of the same moving point can be detected synchronously through two PSD sensors that have a certain distance. The point will be imaged on both PSDs, and two groups of plane coordinates will be obtained, then the spatial coordinates of the moving point will be obtained through coordinate transformation. To different measuring range, the double PSDs mounting plate on the tracing measurement system can adjust the space relative position of the PSDs, including relative swing angle, pitch angle and light heart relative distance, besides, it can hold its relative position, thus the mounting plate has five degrees of freedoms (DOFs) that can be adjusted. The design of many DOFs adjustable mounting plate is the key technology of the tracing measurement system which based on the double PSDs. The design of double PSDs mounting plate on the tracing measurement system (mainly includes four DOFs platform support and the support to adjust the positions of the PSD and the lens) was completed in this paper, and the designed plate met the design requirements.