Journal of Advanced Mechanical Design, Systems, and Manufacturing
Online ISSN : 1881-3054
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Parameter Optimization and Electrode Improvement of Rotary Stepper Micromotor
Junji SONEToshinari MIZUMAShunsuke MOCHIZUKIEdin SARAJLICChristophe YAMAHATAHiroyuki FUJITA
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2010 Volume 4 Issue 6 Pages 1133-1144

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Abstract

We developed a three-phase electrostatic stepper micromotor and performed a numerical simulation to improve its performance for practical use and to optimize its design. We conducted its circuit simulation by simplifying its structure, and the effect of springback force generated by supported mechanism using flexures was considered. And we considered new improvement method for electrodes. This improvement and other parameter optimizations achieved the low voltage drive of micromotor.

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© 2010 by The Japan Society of Mechanical Engineers
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