Wireless Driving of a Micromirror Device by Electoromagnetic Excitation Tuned to Mechanical Resonance of Rotation

Abstract

Wireless driving of a micromirror device is achieved by electromagnetic excitation tuned to the mechanical resonance of the mirror rotation. The micromirror used is designed for low-voltage-driving. Static mirror rotation angle is 7.7 deg. at 12 V bias. The micromirror is connected to a coil for receiving the driving energy through electromagnetic induction. Magnetic field of 19.3 mT at the surface of the first coil induces 0.6 V at the second coil that is 24 mm apart from the first coil. An LC resonance circuit is incorporated in the second coil system to enhance the induced voltage. The LC resonance frequency is tuned to induce the mechanical resonance of the micromirror device. When the separation distance between the first and second coils is 24 mm, the voltage induced by the LC resonance is 1.43 V. Mirror rotation angle is 0.3 deg. for half stroke is achieved. It is expected that the rotation angle is expanded by increasing the Q factors of the electrical circuit and mechanical resonance of the micromirror. These will be achieved by reducing the loss in the electrical circuits and packaging the micromirror device in vacuum with hermetic seal.