Abstract
We present a rapid process for producing flat and smooth surfaces. In this technical note, a fabrication result of a carbon mirror is shown. Electrolytic in-process dressing (ELID) grinding with a metal bonded abrasive wheel, then a metal-resin bonded abrasive wheel, followed by a conductive rubber bonded abrasive wheel, and finally magnetorheological finishing (MRF) were performed as the first, second, third, and final steps, respectively in this process. Flatness over the whole surface was improved by performing the first and second steps. After the third step, peak to valley (PV) and root mean square (rms) values in an area of 0.72 x 0.54 mm2 on the surface were improved. These values were further improved after the final step, and a PV value of 10 nm and an rms value of 1 nm were obtained. Form errors and small surface irregularities such as surface waviness and micro roughness were efficiently reduced by performing ELID grinding using the above three kinds of abrasive wheels because of the high removal rate of ELID grinding, and residual small irregularities were reduced by short time MRF. This process makes it possible to produce flat and smooth surfaces in several hours.
