NCTAM papers, National Congress of Theoretical and Applied Mechanics, Japan
53rd NCTAM papers, National Congress of Theoretical and Applied Mechanics, Japan
Session ID : 3B2
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OS19
Application of the total simulation for the formation process of the thin solid nano structure films
*Masanobu IshidaYasunori Yamamura
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Abstract
The total simulation model applied for the thin solid film formation used by the industrial sputtering method is presented.
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© 2004 Committee for Mechanics and Structure,Science Council
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