Earozoru Kenkyu
Online ISSN : 1881-543X
Print ISSN : 0912-2834
ISSN-L : 0912-2834
Feature Articles —Material Synthesis by Aerosol Process—
Fabrication of Nanostructures Using Metal Clusters
Toshihiko KANAYAMA, Tetsuya TADA, Kenji KOGA
Author information
Keywords: Deposition of Metal Clusters, Si Nanostructure, Plasma Etching, Condensation Nucleus, Electron Beam Lithography, Mass-Selected Cluster Ions, Au Clusters, Ag Clusters, Cu Clusters
JOURNAL FREE ACCESS

1998 Volume 13 Issue 3 Pages 204-208

Details
Download PDF (587K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© 1998 Japan Association of Aerosol Science and Technology
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top