パラボリックフライトを使ったシリコンの 無容器プロセシング実験

抄録

An electro-magnetic levitation furnace for use in parabolic flight was developed, which consists of a furnace chamber, an evacuation pump, two sorts of RF power supplies, and the cooling system. A graphite suscepter was used for semiconducting materials, such as silicon, to be heated so as that the electrical conductivity is enlarged enough for the sample to be levitated only by RF electromagnetic force. The parabolic fright experiment was carried out by using GULFSTREAM-II of Diamond Air Service, where the sample of non-doped silicon was successfully levitated.