抄録
We propose a new technique, “position-controlled CVD using catalytic reaction, ” to modify pore structure. By loading the catalyst for the reverse water gas shift reaction on a support that is to be modified, we can confine the hydrolysis reaction zone to a narrow region surrounding the catalyst where H2O is generated. An anodic alumina membrane with pore size of 26 nm was used as the support. Reactant gases, H2, CO2 and TiCl4 were fed into the same side of the membrane. The effects of reaction conditions on pore modification are investigated on the basis of FE-SEM observations and permeation tests. The pore size and permeance through the membrane gradually decrease with reaction time. Deposition morphology changes with reaction conditions, such as temperature, and H2, CO2 and TiCl4 feed rates. In some cases, particles with 0.1–1 μm diameter are formed on the outer surface of membrane.
