Journal of the Ceramic Society of Japan (日本セラミックス協会学術論文誌)
Online ISSN : 1882-1022
Print ISSN : 0914-5400
ISSN-L : 0914-5400
論文
窒化ケイ素粉末表面のSiHx吸収バンドの拡散反射フーリエ変換赤外線分光による解析
Hien Tran Thi ThuIshizaki Chanel石崎 幸三
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ジャーナル フリー

2004 年 112 巻 1301 号 p. 1-5

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The SiHx stretching absorbance region (2300–2000 cm−1) of seven different commercial Si3N4 powders was investigated by diffused reflectance infrared Fourier transform (DRIFT) spectroscopy. The powders evaluated were produced by three different methods: diimide precipitation, carbothermal reduction and nitridation of silicon using different nitriding media and final treatments. SiH groups were detected in all powders. The results show the presence of H-SiXYZ tetrahedral units. XYZ can be different atoms or groups (Si, H, N, O, NH, NH2 or OH) that bond to the same silicon atom. The H–Si bands were classified considering the backboned atoms of the H–Si into four main tetrahedral by fixing the XY atoms and several possibilities for Z as follows: silicon-based; H-SiSiSi (Z=Si, NH, H or O), nitride-based; H-SiSiN (Z=NH2 or O), oxynitride-based; H-SiNO (Z=N, NH or NH2) and silica-based; H-SiOO (Z=NH2, OH, O or H) tetrahedral configurations. The proportions of these tetrahedral units are different for each powder. The powder produced by the carbothermal reduction process using N2 as nitriding media presents the largest fraction of H–Si groups linked to silica-based tetrahedral units. For the other six powders the largest fraction of H–Si groups is linked to silicon-based tetrahedral units.
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© 2004 The Ceramic Society of Japan
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