Enhancement of crystal anisotropy and ferroelectricity by decreasing thickness in (Al,Sc)N films
公開日: 2022/07/01 |
130 巻
7 号
p. 436-441
Shinnosuke Yasuoka, Ryoichi Mizutani, Reika Ota, Takahisa Shiraishi, Takao Shimizu, Shintaro Yasui, Yoshitaka Ehara, Ken Nishida, Masato Uehara, Hiroshi Yamada, Morito Akiyama, Yasuhiko Imai, Osami Sakata, Hiroshi Funakubo