Inorganic-organic hybrid films with a maximum thickness of about 40 μm were prepared from vinyltriethoxysilane (VTES) through a sol-gel process. UV light from a high-pressure mercury lamp was irradiated through a photomask on the hybrid films from VTES. IR and 29Si NMR spectra of the coating films showed that C=C bonds in VTES were polymerized by UV irradiation. Micropatterns with a maximum height of about 40 μm were formed by the etching of unirradiated area of the films.
