有機-無機変換プロセスによる AlN の作製 (総説)

抄録

Pyrolytic “organic-to-inorganic” conversion of precursors (preceramic materials) into aluminum nitride (AlN) has been investigated for the past few decades. AlN precursors can be classified based on their starting aluminum compounds (organoaluminum compounds, inorganic compounds containing aluminum, and metallic aluminum). The preparation of various AlN precursors and their conversion mechanisms during pyrolysis are reviewed.