Journal of the Ceramic Society of Japan (日本セラミックス協会学術論文誌)
Online ISSN : 1882-1022
Print ISSN : 0914-5400
ISSN-L : 0914-5400
ゲストエディターによる特集:有機-無機変換プロセス:論文
ポリチタナシラザンから合成したチタン添加アモルファス窒化ケイ素からの α-Si3N4 の低温結晶化挙動
佐藤 功二齋藤 智浩永野 孝幸岩本 雄二
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2006 年 114 巻 1330 号 p. 502-506

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Polytitanasilazanes with Ti/Si ratios ranging from 0.001 to 0.1 were synthesized by chemical modification of commercially available perhydropolysilazane (PHPS) with Ti(N(CH3)2)4. Amorphous Si-Ti-N ceramics were synthesized by pyrolysis of the polytitanasilazanes in Ar. The results of XRD analysis showed that the crystallization of α-Si3N4 from the Si-Ti-N materials with the Ti/Si ratios ranging from 0.001 to 0.01 started at 1273 K. This crystallization temperature was 200 K lower than that of the PHPS-derived Ti-free amorphous Si-N material. FT-IR and 29Si MAS NMR spectroscopic analyses revealed that, during the polymer/ceramics conversion process, the dehydrogenation reactions of the PHPS were apparently accelerated by the small amount of Ti-doping using Ti(N(CH3)2)4. This could lead to enhancing the lower temperature formation of SiN4 tetrahedral units necessary for the crystallization of α-Si3N4 at 1273 K.
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© 2006 The Ceramic Society of Japan
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