気相反応によるジルコニウムジボライドの合成

抄録

Zirconium diboride (ZrB₂) was deposited on the heated graphite substrate by the chemical vapor reaction of zirconium tetrachloride, boron trichloride and hydrogen. Under certain condition, the resulting deposit was found to have a high density (higher than 99% of theoretical density), a high purity (total impurity less than 100ppm), a high hardness (H_V=2200±100kg/mm²), and to have a preferred orientation in which the (110) or (100) plane of the ZrB₂ crystalline lied parallel to the surface of the graphite substrate.