Thickness Dependence of Sensitivity of SnO2 Film Gas Sensors

Masaaki KANAMORI; Yoshiki OKAMOTO; Yutaka OHYA; Yasutaka TAKAHASHI

doi:10.2109/jcersj.103.113

Journal of the Ceramic Society of Japan (日本セラミックス協会学術論文誌)

Online ISSN : 1882-1022
Print ISSN : 0914-5400
ISSN-L : 0914-5400

酸化スズ薄膜ガスセンサーのガス感度の膜厚依存性

金森正晃, 岡本芳樹, 大矢豊, 高橋康隆

著者情報

ジャーナルフリー

1995 年 103 巻 1194 号 p. 113-116

DOI https://doi.org/10.2109/jcersj.103.113

詳細

抄録

Sensitivity of SnO₂ thin-film gas sensors which were fabricated by the dip-coating method was found to exponentially increase with the decrease in film thickness. This could be ascribed to the substantial increase in the resistivity of the films in air with the decrease in the film thickness, accompanied by the decrease in the size of SnO₂ crystallites.