Si₃N₄セラミックスの鏡面研削機構について

抄録

The mechanism of mirror-finish grinding of Si₃N₄ ceramics was studied under different grinding conditions using a diamond grinding wheel with large grain size (#800, #1200). The main results are summarized below. (1) A good mirror-finished surface with smaller surface roughness was obtained under the grinding conditions of high grinding force and large theoretical wheel cutting distance. (2) By an ESCA analysis of the mirror-finished surface, it was found that a surface layer comprised mainly of silicon and oxygen was generated, and that Si₃N₄ ceramics with extensive coverage of the surface layer had a good mirror-finish-ground surface. Judging from the above results, it was concluded that the good mirror-finish-ground surface was a result of the plasticity produced by the grinding heat at the contact zone between abrasive grains and the workpiece.