電子ビームを用いたセラミックス基板上への帯電像の形成とその観察

抄録

Main process of the powder particles' assembly, proposed for creation of multi-functional materials, consists of drawing electrified patterns on substrates and introducing electrified powder particles onto the substrates. In the process, the powder particles are arranged along with the patterns by electrostatic force. In the present paper, electrification behaviors on ceramic substrates was studied. Electrified images were formed on calcium titanium oxide (CaTiO₃) substrates using electron beam. The substrates were positively electrified by 1kV electron beam, while the substrates were negatively electrified by electron beams with 3kV and higher voltages. Electrified images were observed by the voltage contrast method using 2kV electron beam scanning. Sharpness of electrified images were influenced by the condition of electron exposure. Sharp images were obtained by the electron beams with dose electron density of 0.2pC/μm² and accelerating voltage of 5-15kV. The electrified images disappeared after 1h in air, but were maintained for 62h in vacuum.