定電位電気化学的手法によるチタン酸バリウム薄膜の作製
2001 年 109 巻 1275 号 p. 915-919
詳細
2001 年 109 巻 1275 号 p. 915-919
BaTiO3 thin films were prepared on Pt/Ti/SiO2/Si substrates in a water-methyl alcohol mixed bath, nearly saturated with barium nitrate, by potentiostatic electrochemical deposition. Weights and compositions of the as-grown films were controlled by regulating electrochemical parameters such as the electrode potential, the quantity of electricity, and the concentrations of Ti (IV) peroxo complexes in the electrolysis bath. Ba/Ti ratios in the as-grown films were constant along the depth direction. No impurity in the as-grown films was detected. The as-grown films were amorphous, and Ba2+ ions in them were present mainly as barium nitrate. Polycrystalline BaTiO3 thin films were obtained by annealing above 500°C for 1h in air. The BaTiO3 thin films were crystallized at a relatively low temperature of approximately 500°C due to easy decomposition of barium nitrate to barium oxide and nitrous gas during annealing.
