The oxygen diffusion coefficients of nondoped, Ho-doped and La-doped BaTiO3 polycrystals were evaluated by secondary ion mass spectrometry (SIMS). The La-doped and Ho-doped systems have a greatly reduced oxygen diffusion coefficient compared to nondoped BaTiO3. The oxygen diffusion coefficient of La-doped BaTiO3 was dependent on the amount of La dopant, while the amount of Ho did not influence oxygen diffusion. According to the change of the cooling rate during the fabrication process, the oxygen diffusion of the La-doped BaTiO3 was influenced but that of Ho-doped BaTiO3 changed little.
