導電性Si₃N₄結合TiNセラミックスの開発と特性評価

抄録

Electro-conductive Si₃N₄ bonded TiN ceramics were successfully produced by sintering green compacts composed of Si and TiN powders in nitrogen gas atmosphere. These ceramics showed little dimensional change in the sintering stage, which was very favorable to get near-net-shape ceramic components in as-sintered state. Si and TiN powders were mixed in a ball mill and molded using thermoplastic resin binder. The green body was dewaxed and then sintered in 0.88MPa nitrogen gas atmosphere. The dimensional change in the sintering stage was under 0.3%, and electrical resistivity of 26μΩm was obtained when TiN content was 70vol%. The bending strength of 460MPa was obtained for the ceramics containing 20vol% of TiN. Other properties of these ceramics, such as hardness, thermal expansion coefficient and oxidation resistance, were measured and discussed.