As-grown Mn₃CuN thin films with high crystallinity prepared by dynamic aurora pulsed laser deposition

抄録

Mn₃CuN thin films were prepared using dynamic aurora pulsed laser deposition (PLD), which enables magnetic field application during film growth. The magnetic field can stabilize a plasma state of nitrogen in plume generated from a nitride target. Results show that Mn₃CuN phase with high crystallinity is observed clearly and grown epitaxially on MgO(001) in the as-grown thin films. The as-grown thin films show ferromagnetic transition near 150 K without post-annealing, indicating almost no nitrogen deficiency. These results suggest that dynamic aurora PLD is effective for nitride thin films with high crystallinity.