Lower-temperature processing of potassium niobate films by microwave-assisted hydrothermal deposition technique

Masaki OKURA; Yoshiharu ITO; Takahisa SHIRAISHI; Takanori KIGUCHI; Toyohiko J. KONNO; Hiroshi FUNAKUBO; Hiroshi UCHIDA

doi:10.2109/jcersj2.21115

Feature: Current Development and Future Potentiality of Functional Oxoate Ceramics and Glasses: Full papers

Lower-temperature processing of potassium niobate films by microwave-assisted hydrothermal deposition technique

Masaki OKURA, Yoshiharu ITO, Takahisa SHIRAISHI, Takanori KIGUCHI, Toyohiko J. KONNO, Hiroshi FUNAKUBO, Hiroshi UCHIDA

著者情報

キーワード: Potassium niobate, Hydrothermal synthesis, Thin film, Ferroelectrics, Dielectrics, Epitaxial growth, Crystal orientation, Crystal growth

ジャーナルオープンアクセス

2022 年 130 巻 1 号 p. 123-130

DOI https://doi.org/10.2109/jcersj2.21115

詳細

抄録

Low-temperature processing based on microwave-assisted hydrothermal synthesis was proposed for deposition of piezoelectric oxoate KNbO₃ films. The films were deposited on various substrates at reaction temperature below 200 °C using Nb₂O₅ powder and KOH solution. Epitaxial (100)_c KNbO₃ film with ∼1.3 µm-thick was deposited at a reaction temperature of 150 °C on (100)_cSrRuO₃//(100)SrTiO₃ using 12 mol dm⁻³ KOH solution for 80 min, which is significantly faster than conventional hydrothermal process.

責任著者(Corresponding author)

J-STAGEへの登録はこちら（無料）